Keynote Speakers

May 12, 2025

Progress and Status of Low Dimensional NEMS Resonators

Prof. Zenghui Wang

Professor, University of Electronic Science and Technology of China

E-mail: zenghui.wang@uestc.edu.cn

Short Bio: Zenghui Wang is currently a professor in the Institute of Frontier and Fundamental Sciences (IFFS) at the University of Electronic Science and Technology of China (UESTC). His research interests and expertise primarily focus on nanoscale devices and systems, particularly Nanoscale Resonators, and High-Frequency Resonant Sensors & Transducers. Prior to joining Case, during 2010-2012, he worked at Cornell University as a postdoc researcher. He earned a Ph.D. degree (2010) from University of Washington, Seattle, for building an ultra-high frequency NEMS resonant sensor with an individual single-walled carbon nanotube, and using it to detect and study the low-dimensional phase transitions of the atomic layer adsorbed on the nanotube surface. He is an expert on studies of emerging nanoscale devices and sensors based on new materials such as carbon nanotubes, graphene, and other low-dimensional nanomaterials, and has published 20+ research articles in peer-reviewed journals, including Science, Nature Physics, Nature Nanotechnology, Nature Communications, Science Advances, Nano Letters, ACS Nano, Physical Review Letters, 2D Materials, etc.,. He has given dozens of invited talks and seminars at peer-reviewed conferences and research universities. He is an Associate Editor for Micro and Nano Letters, and has been serving on the Technical Program Committees for IEEE IFCS, IEEE Nano, and the MEMS/NEMS Technical Group at the American Vacuum Society (AVS) International Symposium and Exhibition

Abstract

The advent of low-dimensional nanostructures [1-2] has enabled a plethora of new devices and systems. Among them, nanoelectromechanical systems (NEMS) offers the unique capability of coupling the exquisite material properties found in these atomically-defined nanostructures with their mechanical degree of freedom, opening new opportunities for exploring exotic phenomena at the nanoscale [3-8]. In particular, as these devices driven into mechanical vibration—just as musical instruments—they become essentially nanoscale guitars, drums, tuning folks, etc. By studying the infinitesimal mechanical vibrations in these nanoscale “music instruments”, i.e., listening to the “sound of music” at the nanoscale, researchers can study a number of fundamental physical processes such as absorption, phase transition, anisotropy, and nonlinear processes, and can potentially enable novel signal transduction and logic processing functions [9-10].

References

Qiu et al., SCIENCE CHINA Information Sciences 67 (2024) 160400
Wang et al., SCIENCE CHINA Information Sciences 65 (2022) 211401
Xu et al., ACS Nano 16 (2022) 15545
Xu et al., Small 19 (2023) 2300631
Zhu et al., Chinese Physics Letters 40 (2023) 038102
Zhu et al., Nano Letters 22 (2022) 5107
Xu et al., ACS Nano 16 (2022) 20229
Zhu et al., SCIENCE CHINA Information Sciences 65 (2022) 122409
Zhu et al., InfoMat 6 (2024) e12553
Wang et al., Chip 2 (2023) 100038

Design, Modeling and Intelligent Control of multi-DOF Nanopositioning Systems

Prof. Yanding Qin

Professor, Nankai University

E-mail: qinyd@nankai.edu.cn

Short Bio: Dr. Yanding Qin is a Professor with the College of Artificial Intelligence, Nankai University, Tianjin, China, and also with the Institute of Intelligence Technology and Robotic Systems, Shenzhen Research Institute of Nankai University, Shenzhen, China. He received the Ph.D. degree in mechanical engineering from School of Mechanical Engineering, Tianjin University, Tianjin, China, in 2012. He was a Visiting Scholar with School of Mechanical Engineering, Purdue University, IN, USA. He was a Postdoctoral Research Officer with Department of Mechanical and Aerospace Engineering, Monash University, Melbourne, Australia. His research interests include micro/nano manipulation robotics and medical robotics. His research has been funded by the National Key Research and Development Program of China and National Natural Science Foundation of China. He is serving as the Section Editor in Handbook of Wireless Positioning (Springer Nature). He has published over 70 papers in international journals and conferences.

Abstract

Piezoelectric actuator (PEA) actuated nanopositioning systems have been widely used in micro/nano manufacturing and manipulation. In these systems, the inherent hysteresis of the PEA is mixed with the input couplings and output couplings of the mechanism. Although nanometer level motion resolution is achievable, it is still challenging to improve the motion accuracy for these systems, especially in completing multi-DOF positioning tasks. This presentation will report on our recent research work on the design, modeling and intelligent control strategies for PEA-actuated nanopositioning systems, including kinematics and dynamics modeling of the mechanism, hysteresis modeling and compensation of PEAs, MIMO controller design. The applications in different fields verify the effectiveness of the proposed methods in improving the motion accuracy and robustness of the overall system. The challenging problems will be addressed, and future work will be discussed.

Micro/nano Piezoelectric Materials and Energy Harvesting

Prof. Zhengbao Yang

Professor, Hong Kong University of Science and Technology

E-mail: zbyang@ust.hk

Short Bio: Prof. Yang earned his bachelor’s degree from the Harbin Institute of Technology and completed his Ph.D. at the University of Toronto in 2016. He is currently an associate professor in the Department of Mechanical and Aerospace Engineering at the Hong Kong University of Science and Technology. His research interests encompass Smart Materials and Mechatronics, with a particular emphasis on the development of piezoelectric materials, energy harvesters, and wireless sensor systems. Prof. Yang has applied for 24 patents in China and the USA and has authored over 130 academic articles in high-impact journals, including 15 papers in the Nature and Science series over the past five years. He is serving as Editor of academic journals: “Sensors”, “Smart Materials and Structures”, and “IEEE/ASME Transactions on Mechatronics”.

Abstract

With the rapid advances in wireless sensors, implantable electronics, and wearable devices, the demand for high power-density and long-lifespan power sources is becoming increasingly stronger. Energy harvesting, emerging as an alternative energy solution to batteries, holds great potential to achieve self-powered autonomous operations of such low-power electronic devices, and thus has recently attracted much attention from both academia and industry. The piezoelectric effect is widely adopted to convert mechanical energy to electrical energy, due to its high energy conversion efficiency, ease of implementation, and miniaturization. In this talk, I will briefly introduce our recent research achievements at the Smart Transducers and Vibration Laboratory (STVL), including energy harvesters for smart watch, shoes, jet engine, face masks, smart tires and railway monitoring, and new lead-free and bio-organic materials.

May 13, 2025

Micro-Nano Manipulation Robot

Prof. Zhan YANG

Professor, Soochow University

E-mail: yangzhan@suda.edu.cn

Short Bio: Zhan Yang received his B.S., M.S., and Ph.D. from Harbin University of Science and Technology in Automation Engineering , Nagoya University (2010,2014) in Micro-Nano System Engineering respectively. He has been a professor with the school of mechanical and electrical engineering and Center of Robotics and Microsystem at Soochow University since 2022. He has published more than 100 academic papers in IEEE TRO, IEEE T-MECH, Science Adv. and Nature Comm., and presided over many projects such as youth, general and key projects of the Natural Science Foundation of China, sub-projects of the 863 project and key research and development projects of the Ministry of Science and Technology.
He is NTC Adcom Member, Member Representative, Robotics & Automation Society (RA) in 2017，2018 and 2020. He has been serviced as workshop Chair of IEEE NANO 2017, Publicity Chair of IEEE NANO 2019, Program Co-chair of IEEE NEMS 2019. His research interest are nanorobotics, nanomanipulation and CNT based-nanodevices. He has published more than 50 papers supported by National Science Funding of China and Key Research Program of China. He is the Secretary General of Nano Robotics Society of China

Abstract

The evolution from passive nanoscale observation to active robotic manipulation represents a paradigm shift in humanity’s quest for atomic-scale sovereignty. This review systematically traces the historical and conceptual foundations of nanomanipulation, beginning with ancient atomic theory and crystallizing through Feynman’s vision of deterministic atomic control. Central to this progression are three interdependent pillars: observation sovereignty(resolving nanoscale entities), construction sovereignty (assembling functional architectures), and operational sovereignty(integrating automation, vision, and control). We critically examine transformative technologies—from optical tweezers and atomic force microscopy (AFM) to autonomous nanorobots in scanning electron microscopy (SEM)—highlighting their roles in overcoming diffraction limits, thermal noise, and quantum stochasticity. Innovations such as machine learning-enhanced control, stochastic model predictive control, and biohybrid nanorobots underscore the transition from scripted tasks to adaptive autonomy. However, persistent challenges—including the observer-constructor paradox, environmental stochasticity, and scalability—demand interdisciplinary convergence of quantum metrology, neuromorphic computing, and ethical frameworks. By bridging theoretical insights with practical applications, this review charts a roadmap for nanorobotic systems to transcend laboratory confines, enabling breakthroughs in nanomedicine, quantum devices, and atomic-scale manufacturing. The synthesis of embodied intelligence, distributed sensing, and edge quantum computing heralds a future where nanomanipulation redefines the boundaries of science, engineering, and philosophy

Nanocrack-based strain sensors

Prof. Junshan Liu

Professor, Dalian University of Technology, China

E-mail: liujs@dlut.edu.cn

Short Bio: Junshan Liu is the director of Key Laboratory for Micro/Nano Technology and System of Liaoning Province, School of Mechanical Engineering, Dalian University of Technology. His research interests include polymer micro/nano fabrication technologies, microfluidics and soft electronics. He is an editorial board member of the Chinese Journal of Mechanical Engineering， Chinese Journal of Scientific Instrument and Journal of Transduction Technology. He is a council member and deputy secretary-general of the Chinese Society of Micro-Nano Technology, a vice-chairman and deputy secretary-general of Micro-Nano Manufacturing Technology Branch of Chinese Mechanical Engineering Society, a council member and deputy secretary-general of the National Intelligent Sensor Innovation Alliance, and the member of the National Microelectromechanical Technology Standardization Technical Committee.

Abstract

Cracks are always associated with defects or damages. However, recently cracks are attracting great research interests in many fields. One of the most successful applications of cracks is nanocrack-based strain sensors. In this talk, two photolithography-based methods for precise patterning of nanocracks were introduced. The arbitrary nanocrack patterns can be simply fabricated with a high repeatability, such as 50 mm-long parallel straight nanocracks with any desired densities, or various shaped patterns. Several types of ultrasensitive nanocrack-based strains sensors were developed by using these two methods. For example, an electronic whisker-type mechanosensor exhibited a detection resolution of 72.2 nN, and recognized the surface morphology with a height of 30 nm. In addition, a bioinspired environment-adaptable multifunctional electronic skin could precisely measure the strain and temperature simultaneously and exhibited a high strain sensitivity with the gauge factor up to 90.

Light-induced patterning of semiconductor nanoparticles

Prof. Chengzhi Hu

Associate Professor, Southern University of Science and Technology

E-mail: hucz@sustech.edu.cn

Short Bio: Chengzhi Hu is a tenured Associate Professor in the Department of Mechanical and Energy Engineering at Southern University of Science and Technology, China. He received the Ph.D. degree in the Department of Micro-Nano Systems Engineering from Nagoya University in 2014. From 2014 to 2018, he was a postdoctoral associate in the Multi-Scale Robotics Lab at ETH Zurich. His primary research goals are directed toward the development of micro-/nano- robots, and other bioMEMS devices for use in single-cell analysis and targeted therapy. He has published over 50 journal papers, including Nat. Commu., Adv. Mater., Adv. Funct. Mater., ACS Nano, Small, Lab Chip, etc.

Dr. Hu is a recipient of China’s National Youth Talents Program. He serves as the journal editor of Cyborg and Bionic Systems, Microsystems & nanoengineering. He is currently a Senior IEEE Member, a Senior Member of the Chinese Society of Micro-Nano Technology, a Member of the Chinese Association of Automation, and ASME Member. He received several best paper awards, IEEE MHS 2012, IEEE ICRA 2015, IEEE CBS 2023, IEEE ICMA 2024, and MINE Young Scientist of 2024.

Abstract

The integration of colloidal nanoparticles into microdevices holds great promise for emerging technologies, including smart dust, photoelectric devices, wearable electronics, miniature robots, and medical implants. In this talk, I will introduce a large-scale colloidal patterning method for semiconductor nanoparticles, leveraging light-triggered modulation of surface charge. Upon UV exposure, ZnO nanoparticles absorb photons, initiating a reaction that cleaves surface-bound citrate ligands. By further modifying these ligands, we can precisely control surface charge, enabling both positive and negative patterning on the same substrate. This method is remarkably simple and efficient, requiring less than two minutes of exposure at low optical intensity (as little as 6 mW cm⁻²), making it a cost-effective option for mass-producing semiconductor nanoparticle patterns. Additionally, this technique is compatible with various substrates, including transparent rigid glass and flexible polyvinyl chloride (PVC), and can be extended to other semiconductor nanoparticles such as ZnS and TiO₂.

May 14, 2025

Sonothrombolysis: Transducers and Contrast Agents

Prof. Qingsong Xu

Professor, University of Macau

E-mail: qsxu@um.edu.mo

Short Bio: Dr. Qingsong Xu is a Professor at the Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, and Director of the Smart and Micro/Nano Systems Laboratory. His research involves intelligent micro/nanosystems, precision robotics, and biomedical applications. He has published four books and over 420 papers in international journals and conferences, cited over 14000 times in Google Scholar with an H-index of 70. He currently serves as an Associate Editor of IEEE Transactions on Robotics (T-RO). He was a Technical Editor of IEEE/ASME Transactions on Mechatronics (T-MECH) and an Associate Editor of IEEE Transactions on Automation Science and Engineering (T-ASE) and IEEE Robotics and Automation Letters (RA-L). Prof. Xu has received more than ten best paper awards from international conferences and multiple times of Macao Science and Technology Awards from Macao SAR, China. He has been selected into the top 2% of the world’s top scientists released by Stanford University since 2019. He is a Fellow of IEEE, ASME, and AAIA.

Abstract

A flexible microrobot has a flexible structure or operation, which is essential for performing precision micromanipulation and force interaction tasks by interacting with the environment. Flexible microrobots include flexible-structure and flexible-function microrobots. Flexible-structure microrobots transmit displacement and force via elastic deformation of the materials. Compliant microrobot end-effectors and flexible micromanipulators are two kinds of tools that must meet strict standards for robotic handling with contact force regulation. Flexible-function microrobots can perform dexterous manipulations of target micro-objects with delicate contact force regulation and environmental force resistance. This presentation will report on our recent development of flexible microrobots for precision biomedical applications. It ranges from compliant robotic micromanipulators for biological cell micromanipulation, magnetic soft catheter robots for vascular intervention, flexible microinjection robots for high-throughput injection of biological samples, untethered magnetic micro/nanorobots for precision therapy. These flexible microrobotic systems will enable many applications to enhance human health via precision medical treatment. The challenging problems will be addressed, and future work will be discussed.

Multi-scale Automation and Robotic Systems for Advanced Healthcare

Prof. Jun Liu

Associate Professor, The University of Hong Kong

E-mail: dr.jun.liu@hku.hk

Short Bio: Jun Liu is an Associate Professor in the Department of Data and Systems Engineering at The University of Hong Kong. Prior to joining HKU, he worked in the Department of Mechanical Engineering at City University of Hong Kong as an Assistant Professor starting in 2019 and was promoted to Associate Professor in 2024. He obtained his Ph.D. from the University of Toronto in 2016 and his B.E. in Automation and B.S. in Economics from Shandong University in 2008. He received his postdoctoral training at the Dalio Institute of Cardiovascular Imaging at Cornell University, where he conducted research on medical robotics and advanced imaging technologies.

His research has been recognized at flagship robotics and automation conferences, earning multiple awards, including the Best Student Paper Award and Best Medical Robotics Paper Finalist Award at the IEEE International Conference on Robotics and Automation (IEEE ICRA) in 2014, the Gaitech Best Paper in Robotics Award at the IEEE International Conference on Information and Automation (IEEE ICIA) in 2016, and the Best New Application Award from IEEE Transactions on Automation Science and Engineering (IEEE TASE) in 2018.

Abstract

This talk will introduce a new search and detection method for automatically locating end-effector tips; vision-based contact detection algorithms, and microrobotic manipulation techniques. Furthermore, this talk will present microrobotic systems integrating these techniques for microinjection, along with the introduction of an inner actuated microrobot specially designed for minimally invasive medical procedures. The new technology has the potential to reshape cardiovascular drug testing and revolutionize the automated cryopreservation of reproductive cells in IVF clinics. Future research directions including augmented reality-assisted surgery and personalized healthcare will also be discussed.

MEMS Mirror-Enabled Smart Eyewear: Advancing Wearable Technology for Precision Medical Diagnostics

Prof. Zhuqing Wang

Professor, School of Mechanical Engineering, Sichuan University

E-mail: wzhuqing@scu.edu.cn

Short Bio: Dr. Zhuqing Wang is a Professor and Doctoral Supervisor at Sichuan University’s School of Mechanical Engineering, leading the Microelectromechanical Systems (MEMS) and Intelligent Sensing Innovation Center. Recognized as an “Innovative Leading Talent” under Sichuan Province’s Tianfu Emei Program, he holds a Ph.D. from the University of Yamanashi (Japan) and has conducted research at Kyoto University, Tohoku University, and the Japan Advanced Institute of Science and Technology. Dr. Wang has secured over 30 million RMB in funding for projects such as the National Key R&D Program on Intelligent Sensors and the Sichuan Provincial Key R&D Project. His pioneering work includes MEMS-based medical devices commercialized by Canon, multi-target thermal urine detection chips, and a four-channel nanomechanical gas sensor published in *Nature*. With nearly 100 SCI papers, 33 patents, and contributions to AI-driven healthcare systems, he bridges advanced manufacturing and medical innovation.

Abstract

Eye-tracking technology, driven by MEMS mirror systems for their precision, speed, and low latency, is revolutionizing applications like strabismus screening. This work traces its evolution, contrasts camera-based and MEMS-based solutions, and presents an internally resonant MEMS mirror for portable devices. Strabismus, affecting 4% of children, demands precise eye-motion analysis, yet traditional methods (e.g., synoptophores) remain inefficient and unreliable. Despite advancements in automated tools, clinical adoption is hindered by accuracy and usability gaps.
We propose a dual-mode system combining MEMS mirrors with VR for rapid, objective screening. A 120-second protocol integrates image-based gaze estimation, validated via clinical trials at West China Hospital. Results show automated detection and diagnostic guidance, enabling efficient large-scale screening. This innovation merges MEMS sensing with healthcare needs, demonstrating potential to transform early diagnosis and management of ocular disorders.

Microfluidic Living Surface-Anchored Immunosorbent Assay (LISA) Enables Single-Cell Deep Phenotyping and Sorting for Precision Medicine

Prof.Chia-Hung Chen

Associate Professor, City University of Hong Kong

E-mail: chiachen@cityu.edu.hk

Short Bio: Prof. Chia-Hung Chen is a renowned expert in microfluidic biosensors and an Associate Professor of Biomedical Engineering at City University of Hong Kong. Recognized as a top 2% scholar by Stanford University, he earned his Ph.D. from the University of Cambridge and completed postdoctoral research at the Massachusetts Institute of Technology. Chen specializes in soft systems and high-throughput microfluidic technologies for analyzing cellular heterogeneity in human health and disease. His research focuses on developing innovative tools to revolutionize diagnostics and therapeutic strategies for complex diseases, including cancer, infectious diseases, and autoimmune disorders, advancing precision medicine. He has authored over 80 peer-reviewed journal articles in leading publications such as Nature Communications, ACS Nano, Advanced Materials, Advanced Functional Materials, Analytical Chemistry, and Lab on a Chip. As a principal investigator, he has secured more than 25 international competitive research grants. Additionally, he has served on the editorial boards of Biomicrofluidics and IEEE journals. His work spans microfluidic systems and single-cell micro/nano-technologies, driving groundbreaking advancements in biomedical research.

Abstract

Precision medicine aims to deliver the right drug to the right patient at the right time. In cancer therapy, this requires addressing not only inter-patient variability but also the complex cellular heterogeneity present in physiological samples. While recent studies have emphasized the importance of cellular heterogeneity in cancer treatment, few have thoroughly examined its implications for molecular and secretory functional profiles at the single-cell level. This gap is largely due to the lack of technologies that combine high sensitivity, throughput, and speed to sort critical functional cells for in-depth analysis. To address these challenges, we developed the microfluidic Living Surface-Anchored Immunosorbent Assay (LISA)—a high-throughput platform that enables sensitive, multiplexed secretion assays at the single-cell level with nanomolar detection sensitivity. LISA enables deep phenotyping and sorting of up to 10⁷ single cells within 30 minutes, achieving more than a 10-fold improvement over current droplet-based screening technologies. This allows for the efficient isolation of critical functional cell subsets for comprehensive molecular and functional validation. Using LISA, we identified rare, highly functional immune cells with ultra-high cytokine secretion, multiple surface marker expression, and potent cytotoxicity, and further revealed their unique gene signatures. LISA is a transformative tool for large-scale single-cell analysis, advancing functional validation and accelerating progress in precision oncology and immunotherapy.

Flexible Microrobots for Precision Biomedical Applications

Prof. Xueyong Wei

Professor, Xi’an Jiaotong University

E-mail: seanwei@mail.xjtu.edu.cn

Short Bio: Xueyong Wei received his M.S. degree in the Xi’an Jiaotong University in 2005 and Ph.D. degree in the University of Birmingham in 2009. He then conducted research on micromechanical inertial sensors in the University of Cambridge as a post-doctoral research associate. He joined Xi’an Jiaotong University in 2012 and his research interests include micromechanical resonators and oscillators, MEMS sensors, and Microfluidics. He has published more than 150 peer-reviewed papers and has delivered over 50 invited talks. He is Senior Member of IEEE, Standing Committee Member of China Control and Instrument Society (CIS). He serves as the editorial board member of Microsystems & Nanoenginering and Chinese Journal of Sensors and Actuators, and the Section Executive Editor-in-Chief of Engineering, an international journal launched by Chinese Academy of Engineering in 2015. He has also served as session chair, organization chair of many several home and international conferences.

Abstract

Since Huygens first discovered the phenomenon in two pendulums, synchronization, embodying nature’s yearning for order, has been widely observed in various natural and engineered systems at the micro scale. The understanding of synchronization took more than two centuries and there remain many mysteries. Several recent studies have shown that the rhythms of oscillating objects can be adjusted via an interaction and accordingly it provides another approach to improve the frequency stability of micro and nanomechanical oscillators, which is essential to the development of high performance resonant micro sensors. In this talk, I will introduce our technical breakthrough of developing Synchronization Enhanced MEMS Sensing Technology.

Semiconductor Optoelectronic Regulation and Infrared Perception Devices

Prof. Jinshui Miao

Professor, Shanghai Institute of Technical Physics, Chinese Academy of Sciences

E-mail: jsmiao@mail.sitp.ac.cn

Short Bio: Jinshui Miao is a Professor and Ph.D. advisor, leader of a youth research team at the Chinese Academy of Sciences, academic leader at a national key laboratory, and a selected member of the Shanghai “35 Under 35” Young Science and Technology Leaders Program. He completed his postdoctoral research at the University of Pennsylvania and received his Ph.D. from Michigan State University. His research has long focused on artificial intelligence-driven optoelectronic chips. He has published over 90 SCI-indexed papers and holds more than 20 authorized invention patents.

Abstract

With the rapid advancement of artificial intelligence (AI) technology, the integration of AI chips with infrared chips has become a key trend in driving the development of intelligent devices. By combining AI processing units with infrared sensing technology, this integrated solution demonstrates tremendous potential in edge computing devices. AI-driven infrared intelligent sensing chips not only offer high-precision environmental perception but also enable real-time processing and analysis of infrared images, significantly enhancing devices’ autonomous decision-making and response capabilities. This is particularly valuable in scenarios such as security monitoring, smart wearables, and autonomous driving, where edge devices can independently perform tasks such as image recognition and target tracking.