Premium tutorial

in celebration of the receipt of IEEE Jun-ichi Nishizawa Medal in 2016

Given by Prof. Masayoshi Esashi, Tohoku University
Date: 9:30-12:30, 17 April, 2016
Venue: Studio Hall, 6th floor, L-Park Sendai (capacity: 190 persons)
Title: Basics of MEMS (Micro Electro Mechanical Systems)

Contents

I. Introduction  (20 min)
II. MEMS fabrication (60 min)
-1- Patterning
-2- Etching
-3- Deposition and stress control
-4- Bonding
-5- Process combination
-6- Integration with circuits
-7- Packaging and assembly
-8- Design, evaluation

Coffee break

III. MEMS elements (20 min)
-1- Sensors
-2- Actuators
-3- Energy sources
IV. MEMS applications (60 min)
-1- Automobile, Home (Mechanical sensors)
-2- Information, Communication (I/O, communication…)
-3- Manufacturing, Monitoring etc.
-4- Biomedical
V. Q & A (10 min)

Esashi

Prof. Masayoshi Esashi  -a pioneer of MEMS-
The World Premier International Research Center Advanced Institute for Materials Research (WPI-AIMR), Tohoku University
Director of Micro System Integration Center (μSIC), Tohoku University

Prof. Masayoshi Esashi received the B.E. degree in electronic engineering in 1971 and the Doctor of Engineering degree in 1976 at Tohoku University.
He served as a research associate from 1976 and an associate professor from 1981 at the Department of Electronic Engineering, Tohoku University. Since 1990 he has been a professor and he is now in The World Premier International Research Center Advanced Institute for Materials Research (WPI-AIMR) and concurrently in Micro System Integration Center (μSIC) (director) in Tohoku University.

Prof. Masayoshi Esashi has been honored with IEEE Andrew S. Grove Award in 2015.